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In: Chemistry

silicon carbide substrate thermal stress

silicon carbide substrate thermal stress

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Expert Solution

Silicon Carbide, SiC

Silicon Carbide is the only chemical compound of carbon and silicon. It was originally produced by a high temperature electro-chemical reaction of sand and carbon. Silicon carbide is an excellent abrasive and has been produced and made into grinding wheels and other abrasive products for over one hundred years. Today the material has been developed into a high quality technical grade ceramic with very good mechanical properties. It is used in abrasives, refractories, ceramics, and numerous high-performance applications. The material can also be made an electrical conductor and has applications in resistance heating, flame igniters and electronic components. Structural and wear applications are constantly developing.

.Key Silicon Carbide Properties

Low density
High strength
Low thermal expansion
High thermal conductivity
High hardness
High elastic modulus
Excellent thermal shock resistance

Superior chemical inertness

Silicon Carbide Typical Uses

Fixed and moving turbine components
Suction box covers
Seals, bearings
Ball valve parts
Hot gas flow liners
Heat exchangers
Semiconductor process equipment

General Silicon Carbide Information

Silicon carbide is composed of tetrahedra of carbon and silicon atoms with strong bonds in the crystal lattice. This produces a very hard and strong material. Silicon carbide is not attacked by any acids or alkalis or molten salts up to 800°C. In air, SiC forms a protective silicon oxide coating at 1200°C and is able to be used up to 1600°C. The high thermal conductivity coupled with low thermal expansion and high strength give this material exceptional thermal shock resistant qualities. Silicon carbide ceramics with little or no grain boundary impurities maintain their strength to very high temperatures, approaching 1600°C with no strength loss. Chemical purity, resistance to chemical attack at temperature, and strength retention at high temperatures has made this material very popular as wafer tray supports and paddles in semiconductor furnaces. The electrical conduction of the material has lead to its use in resistance heating elements for electric furnaces, and as a key component in thermistors (temperature variable resistors) and in varistors (voltage variable resistors).


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