I designed a substrate holder for a thermal evaporator for a lab I work in, based...

I designed a substrate holder for a thermal evaporator for a lab I work in, based on the size of our chamber. It is height adjustable (rod stopping height from falling) with 2 or 3 mm tolerances.

The boat will be very close to tungsten boats as they are heating up. My question is...

what materials should I consider using for this design? And what temperatures can these materials go up to without oxidation occuring? What temperatures can they go up to without melting or significantly deforming?

Expert Solution

To make the substrate holder, I would suggest ceramic materials.

To be more precise, let me give you some examples of the toghest materials around. Tantalum and Hafnium carbides are available which can withstand around 4000 degree Celsius without oxidation. These are costly and can't come in handy pretty easily. They are both refractory ceramics

So, to take it easy, I would suggest Nickel based alloys that are used to coat turbine blades that can withstand around 2000 degrees. Also, there are Ni based alloys or Molybdenum based alloys combined with Silicon or Boron to imprpove their temp withstanding capacity.

samet mamat answered 2 years ago

silicon carbide substrate thermal stress

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