In: Physics
Q1.An n-type silicon wafer undergoes a pre-deposition diffusion process with a constant surface concentration of boride gas; the resulting concentration of boron in silicon at the surface is estimated to be 1x10^18 atoms cm-3 . The background concentration of trace boron atoms in the silicon wafer is estimated to be 1x10^14 cm-3 .(A) Estimate the depth of the p-n junction below the surface when the background doping concentration of the n-type impurity is 3.45 x10^16 cm-3 ; assume the diffusion process proceeds for 10 minutes and has a diffusion parameter given by 10-12 cm2 s -1 .
(B) Estimate the number of boron atoms (per cm2 ) introduced in this thin surface layer following the predeposition step.