2. (a) Photoresist AZ-1450 has a contrast of 3.6 for i-line. Calculate the CMTF. (b) Using...

2. (a) Photoresist AZ-1450 has a contrast of 3.6 for i-line. Calculate the CMTF.

(b) Using this photoresist and wavelength, determine the minimum linewidth for the aligner with a spatial coherence of 0.5. Assume the numerical aperture is 0.4. Show the details of your data obtaining and calculation.

Expert Solution

genius_generous answered 2 years ago

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2. (a) Photoresist AZ-1450 has a contrast of 3.6 for i-line. Calculate the CMTF. (b) Using...

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