Question

Find the area (in mm²) needed for each element to design a Low Pass Filter which has ?=1?Ω, C=1.125nF, L=2.25mH using on-chip elements for R, C and L with assuming room temp and process limits of

1) Resistors from boron substrate doping 1E16cm-3 and Thickness of 0.5µm and line width/space of 0.05µm.

2) Capacitors from SiO₂ gate dielectric 1.8nm thick any square dimension.

3) Inductors from Aluminum lines: 0.25µm high x 0.10µm wide spaced 0.10µm apart in k=3.0 dielectric.

4) You can imagine either circular or square serpentines, with minimum width and space. Cite all sources you use.

Answer 1