Question

In: Electrical Engineering

please select one type of devices from n-MOSFET, p-MOSFET, J-FET and MESFET, and work out the...

please select one type of devices from n-MOSFET, p-MOSFET, J-FET and MESFET, and work out the fabrication process flow. For each fabrication step, please draw a cross-section view with a short description of the process and material to be deposited/removed.

Solutions

Expert Solution

the detailed steps and diagrams for the n mosfet fabrication process is given above .

  1. in first step si3n4 is added and it is in p substrate.
  2. in next the si3n4 is removed by chemical vapour deposition process(CVD) and a poly-si gate is added and it becomes n substrate here .
  3. in third an extra deposited insulator is added .
  4. last step a Al metal is added to the deposited insulator .
  5. these are the 4 steps for the fabrication process of N-mosfet device.

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