Provide a short description, for each of the subject, of no more
than a paragraph and one representative figure.
a) Working principles of micro-sensors (chemical, optical,
acoustic wave, pressure and thermal)
b) Working principles of micro-actuators (thermal forces,
shape-memory alloys, piezoelectric and electrostatic)
c) Materials selection for micro-sensors/actuators (e.g.,
substrates and wafers, silicon compounds such as dioxide, carbide,
nitride, and polycrystalline, silicon piezoelectric, gallium
arsenide, piezoelectric crystals, polymers and films)
d) Micro-sensors/actuators fabrication processes (e.g.,
photolithography, oxidation, chemical vapor deposition,...