In: Mechanical Engineering
Provide a description of the working principles of the following micro-sensors:
1.) chemical
2.) optical
3.) acoustic wave
4.) pressure
5.) thermal
1. Chemical Micro-Sensor
2. Optical Micro - Sensor
3. Acoustic Wave Micro- Sensor
The basic principle of operation for a generic acoustic-wave sensor is a traveling wave combined with a confinement structure to produce a standing wave whose frequency is determined jointly by the velocity of the traveling wave and the dimensions of the confinement structure. Consequently, there are two main effects that a measurand can have on an acoustic-wave microsensor: the wave velocity can be perturbed or the confinement dimensions can be changed. In addition, the measurand can also cause a certain degree of damping of the travelling wave.
4. Pressure Micro- Sensor