In: Chemistry
List and discuss treatment methods to promote adhesive bonding. What is the objective of all the treatments?
Adhesive bonding (also referred to as gluing or glue bonding) describes a wafer bonding technique with applying an intermediate layer to connect substrates of different types of materials. Those connections produced can be soluble or insoluble. The commercially available adhesive can be organic or inorganic and is deposited on one or both substrate surfaces.
adhesive material
coating thickness
bonding temperature
processing time
chamber pressure
tool pressure
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