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In: Mechanical Engineering

why is edge bead more common in thick SU-8 compared to thin Shipley 1827? How can...

why is edge bead more common in thick SU-8 compared to thin Shipley 1827? How can we minimize the edge bead problem (describe all possible methods)? What kind of issues does edge bead produce in soft bake and exposure?

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samet mamat answered 2 years ago
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