01. How can we increase the PMMA and SU8 bonding after spin coating? Is there any...

01. How can we increase the PMMA and SU8 bonding after spin coating? Is there any method and / or protocol available?

Expert Solution

The bonding strength dependence on bonding temperature . A maximum bonding strength of 16 MPa is achieved at bonding temperatures between 110 °C and 120 °C, at a bonding force of 2000 N on a 4 inch wafer.

high bonding strengths at low bonding temperatures.The bonding strength dependence on bonding temperature, in the range between 50 °C and 150 °C, and bonding forces of 1000 N and 2000 N on a 4 inch wafer are investigated.

The maximum bonding strength is in both cases obtained at a bonding temperature between 110 °C and 120 °C, which is just above the glass transition temperature of PMMA, Tg = 105 °C.At higher bonding temperatures and forces the bonding strength becomes nearly constant

queen_honey_blossom answered 2 years ago

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