In: Electrical Engineering
1. What is the difference between LPCVD and PECVD? (Note: Saying “The letter E.” is not a sufficient answer.)
1. Explain why chemical mechanical polished (CMP) is essential for making integrated circuits that have hundreds of millions of transistors.
3. Why must an ion implant be followed by a high-temperature annealing step? And what is the down-side of having to do this follow-up anneal??