The Deal – Grove equation is not valid for initial oxide thickness below 20nm. However, modern...

The Deal – Grove equation is not valid for initial oxide thickness below 20nm. However, modern devices use oxide in the range of 1 to 2nm for gate oxide.

Review the literature on the technology for growth of nanometer thick SiO2films. Discuss the equations dealing with the kinetics of thin oxide growth.

Please help, need ASAP.

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genius_generous answered 2 years ago

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